X-ray Absorption Study of Pulsed Laser Deposited Boron Nitride Films

Дата и время публикации : 1993-11-26T07:57:01Z

Авторы публикации и институты :
A. Chaiken
L. J. Terminello
J. Wong
G. L. Doll
T. Sato

Ссылка на журнал-издание: Ссылка на журнал-издание не найдена
Коментарии к cтатье: 7 pages, LaTeX 2.09. Figures not included, but available by fax. Send email to chaiken@csmgee.llnl.gov
Первичная категория: cond-mat

Все категории : cond-mat

Краткий обзор статьи: B and N K-edge x-ray absorption spectroscopy measurements have been performed on three BN thin films grown on Si substrates using ion-assisted pulsed laser deposition. Comparison of the films’ spectra to those of several single-phase BN powder standards shows that the films consist primarily of $sp^2$ bonds. Other features in the films’ spectra suggest the presence of secondary phases, possibly cubic or rhombohedral BN. Films grown at higher deposition rates and higher ion-beam voltages are found to be more disordered, in agreement with previous work.

Category: Physics